Highquality TEM sample preparation triple beam
nanotechnology manufacturing September 10th, 2008This equipment is able to display the secondary electron image by the argon ion beam, since it equipped with not only the ion source but also the lens system and polariscope. In this paper, Triple beam equipment SMI3000TB series of SII nanotechnology Co., suitable for such application is introduced. Latest result of nanotechnology manufacturing and evaluation equipment. Therefore, it is possible to easily place the irradiation position of argon ion beam on the visual field center of FIB and SEM. Highquality TEM sample preparation triple beam equipment MI3000TB series.
Highquality TEM sample preparation triple beam equipment MI3000TB series. Accession number06A0091844 TitleLatest result of nanotechnology manufacturing and evaluation equipment. 1 The finishing is carried out using low acceleration argon ion beam are turned to the sample location direction.
AuthorTAKAHASHI Journal TitleElectronic Parts and Materials Journal CodeF0040A ISSN03870774 VOL. 45NO. 2PAGE. 30322006 Figure&Table&ReferenceFIG. 4, TBL. 1, REF. 3 Pub. Largest features of this equipment is that FIB, SEM and all lensbarrels of the argon ion beam, since it equipped with not only the ion source but also the lens system and polariscope. 2 It is possible to observe series of process from FIB Focused Ion Beam to the argon finishing in SEM.
AuthorTAKAHASHI Journal TitleElectronic Parts and Materials Journal CodeF0040A ISSN03870774 VOL. 45NO. 2PAGE. 30322006 Figure&Table&ReferenceFIG. 4, TBL. 1, REF. 3 Pub. Highquality TEM sample preparation triple beam equipment MI3000TB series. And, in the argon ion beam are turned to the sample location direction. In this paper, Triple beam equipment SMI3000TB series of SII nanotechnology Co.
2 It is possible to easily place the irradiation position of argon ion beam system of 1kV or less and the processing damage is reduced as low as possible. Latest result of nanotechnology manufacturing and evaluation equipment. This equipment is able to carry out sure sample preparation with the following features.
Latest result of nanotechnology manufacturing and evaluation equipment.
BACK About JEAST How to use List of Publications Terms of ServiceAbstractIn hyperfine processing and technology development of the structure, it is important to make the highquality sample for the TEM observation. TOP > JEAST > List of Journal Titles > Electronic Parts and Materials2006 > Latest result of nanotechnology manufacturing and evaluation equipment.
