But nowadays MEMS covers many nonelectromechanical systems such as microfluidic, biological, chemical systems built on silicon, glass and plastic substrates using technology involving micromachining, photolithography, and thin film technologies. MEMS has its technological roots in IC fabrication technology, but involves some novel fabrication techniques such as bulksurface micromachining, deep dry etching of silicon, LIGA, etc.

MEMS technology is clearly perceived as generic technology that can enable andor enhance many systems for inertial sensing, micro total biologicalchemcial analysis, optical networking, telecommunication,

MEMS technology is clearly perceived as generic technology that can enable andor enhance many systems for inertial sensing, micro total biologicalchemcial analysis, optical networking, telecommunication, etc. Some commercial examples of MEMS include accelerometers, pressure sensors, micromirror array for projection display and optical networks, etc. But nowadays MEMS covers many nonelectromechanical systems such as microfluidic, biological, chemical systems built on silicon, glass and plastic substrates using technology involving micromachining, photolithography, and thin film technologies.

MEMS has its technological roots in IC fabrication technology, but involves some novel fabrication techniques such as bulksurface micromachining, deep dry etching of silicon, LIGA, etc. But nowadays MEMS covers many nonelectromechanical systems such as microfluidic, biological, chemical systems built on silicon, glass and plastic substrates using technology involving micromachining, photolithography, and thin film technologies. MEMS technology is clearly perceived as generic technology that can enable andor enhance many systems for inertial sensing, micro total biologicalchemcial analysis, optical networking, telecommunication, etc.

The size covered in MEMS also varies from nanometer to millimeter.

Daniel Dapkus, Eun Sok Kim, Daniel Lidar, Aristides Requicha, Chongwu ZhouNanotechnology & Micro ElectricalMechanical Systems Research Area What is Nanotechnology & Micro ElectroMechanical Systems Research? What is Micro ElectroMechanical Systems? MEMS coined in late 80s stands for microelectromechanical systems, and used to mean micronsized, transducing electrical to mechanical and vice versa devices and systems during late 80s and early 90s. MEMS technology is clearly perceived as generic technology that can enable andor enhance many systems for inertial sensing, micro total biologicalchemcial analysis, optical networking, telecommunication, etc.

But nowadays MEMS covers many nonelectromechanical systems such as microfluidic, biological, chemical systems built on silicon, glass and plastic substrates using technology involving micromachining, photolithography, and thin film technologies. Research Websites Compound Semiconductor Laboratory Daniel Dapkus USC MEMS Group Eun Sok Kim USC nanotechnology group Chongwu Zhou Faculty List Stephen Cronin, MEMS has its technological roots in IC fabrication technology, but involves some novel fabrication techniques such as bulksurface micromachining, deep dry etching of silicon, LIGA, etc.

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