Lets not forget our probe systems which are unique in providing nonelectrical stimuli and detection already at waferlevel. SUSS equipment is specifically designed to be modular and flexible allowing users to quickly changeover as and when the need arises, serviceability.

SUSS is also heavily involved in nanoimprint lithography and such systems are already in use in optical MEMS.

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Manage Production Demands and Capacity Needs SUSS manual and automated equipment is based on the same platform ensuring unprecedented reliability, upgradeability and, when the need arises, serviceability. Plus, when it comes to precise alignment, who better to trust than the leading photolithography company? Because the same alignment stage is used in both SUSS lithographic tools and bonding tools, any alignment process can be relied upon to be exact. SUSS. Indeed, only SUSS can guarantee submicron post bond alignment accuracy.

SUSS equipment is specifically designed to be modular and flexible allowing users to quickly changeover as and when the need arises, serviceability. Taking the guesswork out of MEMS production and test Modular, Flexible Equipment for Diversified Market MEMS manufacturers require equipment which can adapt quickly to changing applications without significantly increasing The unique SUSS cluster principle means that further modules can be added at any time so that the system can be budgeted for depending on actual requirements SUSS is the company of choice for developing devices with high aspect ratios.

Manage Production Demands and Capacity Needs SUSS manual and automated equipment is based on the same platform ensuring unprecedented reliability, upgradeability and, when the need arises, serviceability.